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CuInSe2, CuGaSe2, and alloys thereof produced by a hybrid sputtering and evaporation method show evidence of being dopable with nitrogen by the replacement of some of the Ar sputtering gas with N2. This results in a decrease in resistivity of the films with increasing N2 pressure in the sputtering gas. No doping of AgInSe2 or CuAlSe2 has been observed to date following similar methods of deposition...
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