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This paper reports on the strain rate dependence of the mechanical properties of aluminum-based metallization layers. Evaporated Al, sputtered Al99%Cu1%, and multilayers of mum-thick Al99%Cu1% films separated by thinner TiN/Ti layers are characterized using the bulge test, the microcompression method and the microtensile technique. Elastic, ductile and fracture parameters are extracted for strain...
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