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A novel single mask dry releasing process for making high aspect ratio SOI MEMS devices is presented. The proposed process takes advantage of lag effect in DRIE. The basic idea is that the buried oxide layer is completely removed using the wide trench and releasing holes defined in the first DRIE, then the second DRIE is carried out to released the narrow trenches. Not only stiction problem is avoided,...
As the most important equipment in substation, it is necessary to make power transformer intelligence firstly in smart grids construction. According to the basic specifications of intelligent machine, i.e., visualization condition, networking control and automation, this paper presents the overall framework of a developed intelligent system for an 110kV power transformer. The structural function definition,...
A kind of system architecture based on multi-agent is proposed in this paper for autonomous control system of an autonomous underwater vehicle (AUV). The autonomous control system is divided into several agents according to its software function and hardware structure. Each agent is designed as a deliberative/act hybrid mode. The agent not only recognizes science events and makes decision unattached,...
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