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Many micro-electromechanical devices have been developed for application in mechanical sensors and actuators, RF devices and telecommunication electronics [1]-[3]. One important application of surface micromachined mechanical resonators, in a wide variety of geometrical configurations, is in beam and comb resonators. MEMS based resonators and filters operating at RF frequencies have been demonstrated...
This paper presents the study of silicon wafer modification by two-beam laser interference. In the work, two-beam laser interference was used to pattern single crystal silicon wafers for the fabrication of gratings, and different laser faiences and pulses were applied to the process in the air. The results were obtained from single laser pulse exposures with the laser fiuences of 637mJ/cm2, 780mJ/cm...
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