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The Ge100-xCux thin films (x=50 at.%-69 at.%) were deposited on nature oxidized Si (100) wafer by dc co-sputtering of Ge and Cu targets. Microstructures was analyzed by X-ray diffractometer. The optical and thermal properties were measured from static test. It was found that the as-deposited phase was single supersaturated epsiv-Cu3Ge phase and it was transformed to Ge and epsiv-Cu3Ge coexisting phases...
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