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In this paper we demonstrate that quality factor (Q) and power handling, two inherently divergent characteristics of a resonator, can be improved simultaneously by designing high-order harmonic resonant structures anchored with multiple tethers. We show that in thin-film piezoelectric-on-substrate (TPoS) resonators, the quality factor is significantly altered by varying the thickness of the resonator,...
In this paper we report a ~1GHz lateral extensional thin-film piezoelectric-on-substrate (TPoS) resonator with an unloaded quality factor (Q) of 6700 in air (frequency-quality factor product of 6.6??1012), a motional impedance of ~160??, and a linear thermal coefficient of frequency of -29ppm. To achieve such low impedance the 21st harmonic resonance mode of a single crystalline silicon block is excited...
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