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Epitaxial anatase and rutile TiO 2 films doped with Cr, Nb, Ta and W are successfully prepared by pulsed laser deposition. Anatase TiO 2 (001) films are grown on SrTiO 3 (001) and LaAlO 3 (001) substrates. Rutile TiO 2 (100) films are also obtained on α-Al 2 O 3 (0001) substrates. The typical temperature of substrates during the deposition is...
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