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CaZr0.9Y0.1O3 − δ films were fabricated by chemical solution deposition on single-crystalline YSZ (ZrO2 doped by 10 mol% of Y2O3) substrates. Mechanical hardness and morphology of the films were studied using nano-indentation and atomic force microscopy techniques. Grain microstructure of the films has been shown to depend upon thermal treatment duration and film thickness. Thin films with grains...
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