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The microfabrication of a backward-wave oscillator is presented for a compact, high-power source in the terahertz range of electromagnetic spectrum. One of micro-electro-mechanical systems (MEMS) technologies, a deep reactive ion etching (DRIE), was employed and achieved the fully 3-dimensional accuracy of coupled cavities operating at 0.1 THz. The prediction and measurement on the scattering parameter...
This abstract describes the design, fabrication and testing of microfabricated 100 GHz coupled-cavity backward wave oscillator (CCBWO), which is operated in space harmonics -1 at 12 kV and 50 mA with round-beam radius 0.18 mm. The RF performance has studied using 3-D electromagnetic field simulator and particle-in-cell code. The cold-test assembly has been fabricated. The complete device assembly...
For the generation of millimeter wave from vacuum electron devices, the microfabrication of an interaction circuit is one of the key factors. Two different technologies, a deep etch X-ray lithography (x-ray LIGA) and a deep reactive ion etching (DRIE), were employed for the comparative study and the realization of a backward-wave oscillator. Both methods showed accurate and reliable results, which...
An asymmetric magnet system was designed for 0.1 THz BWO devices due to the asymmetry introduced by coupling waveguide. This magnet system confines the electron beam of 12 kV and 50 mA and maintains its radius, 0.18 mm, along the circuit length.
Two 100 GHz backward wave oscillators are being developed using two-step deep-etch X-ray lithography (LIGA) fabrication. Based on previous experiments, beam transmission issue was resolved in two ways by modifying the magnetic confinement system and the beam tunnel size. The coupled cavity BWO (CCBWO) is numerically predicted to have start- oscillation current of 30 mA and produce output power of...
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