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An advanced model of two- and three dimensional (2D and 3D) heat and mass transport coupled with surface chemistry and gas-phase clustering is developed for simulating the growth of barium strontium titanate BaSrTiO 3 (BST) thin films by metal-organic chemical vapor deposition (MOCVD) from bis(dipivaloylmethanato)barium Ba(DPM) 2 , bis(dipivaloylmethanato)strontium Sr(DPM) 2 ...
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