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The authors explored some of the challenges of the extremely thin SOI technology for mainstream CMOS. Faceted RSD was used to minimize parasitic capacitance. PFET performance is competitive with best bulk CMOS technologies, while NFET performance can be increased by further reduction in the series resistance. The impact of silicon thickness on the device variability was studied to quantify wafer uniformity...
FinFET integration challenges and solutions are discussed for the 22 nm node and beyond. Fin dimension scaling is presented and the importance of the sidewall image transfer (SIT) technique is addressed. Diamond-shaped epi growth for the raised source-drain (RSD) is proposed to improve parasitic resistance (Rpara) degraded by 3-D structure with thin Si-body. The issue of Vt -mismatch is discussed...
We present a new ETSOI CMOS integration scheme. The new process flow incorporates all benefits from our previous unipolar work. Only a single mask level is required to form raised source/drain (RSD) and extensions for both NFET and PFET. Another new feature of this work is the incorporation of two strain techniques to boost performance, (1) Si:C RSD for NFET and SiGe RSD for PFET, and (2) enhanced...
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