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This paper focuses on heterogeneous integration technology and its application in optical displacement microsensor. The integration is based on the Au-Au surface-activated bonding at a relatively low bonding temperature of 150degC. Applying this technique, an ultra-compact and thin optical displacement microsensor with three-dimensional structure (2.8 mm times 2.8 mm times 1 mm thick) was fabricated...
This paper reports on the development of a new integrated laser Doppler blood flow microsensor and its application for monitoring the blood flow of chickens as an important factor in preventing avian influenza infection. To enable the attachment of the blood flow sensor to chickens without making the attachment felt, we have developed the world's smallest size (1/1000 the weight of a commercial blood...
A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[l]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting...
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