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Summary form only given. Experiments are performed using 193 nm ultraviolet (UV) laser pre-ionization of a seed gas in atmospheric pressure range argon or nitrogen to initiate a discharge that is sustained by 13.56 MHz radiofrequency (RF) power using efficient inductive wave coupling. High-density (1012-1013/cm3), large-volume (~500 cm 3) 760 torr argon plasma is initiated and maintained for 300 ms...
Summary form only given. High-pressure, inductively-coupled plasmas (ICP) have been used for variety of scientific and industrial applications over a large gas pressure range from 50-760 torr. High density ~1011-1014 cm-3, large (500-2500 cc) volume, atmospheric plasmas are of great interest in applications such as material processing, biological decontamination, radar and stealth antennas. We present...
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