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In this paper, we propose a polymer MEMS mirror device which has the futures of the large deflection angle and the low cost fabrication. Many conventional MEMS mirror devices have been composed of Si wafer and, the expensive dry etching equipment has been necessary when etching the Si substrate. Then, we propose new composition and the novel fabrication method without the dry etching process by using...
This paper presents two types of low cost mirror devices composed of the glass and the polymer material. These devices are new constructions composed of the inexpensive glass as the mirror substrate and the polymer as the torsion hinge. The devices can be fabricated by the photolithography and wet etching processes without deep-RIE process. The proposed one construction is the Lorentz force type mirror...
A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.
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