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FDSOI is one of the alternative device architectures chosen to extend CMOS scaling for high-k metal gate. FDSOI is ideal for applications needing a balanced trade-off among power, performance and cost, such as the Internet of Things (IoTs). One of the challenges in FDSOI integration is to obtain a low gate to source drain capacitance (overlap capacitance or DC capacitance). To enable this, low k spacer...
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