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Summary form only given.Microwave plasma sources at atmospheric pressure have a variety of different applications. On the one hand they can be used for the treatment of surfaces, for example the activation or cleaning, and on the other hand they can be applied for the conversion of gases, such as the abatement of waste gases or other chemical synthesis. The presented atmospheric plasma source is based...
Aiming at understanding and controlling the major mechanisms and processes in microwave-generated plasmas, the ground-state densities of the most relevant atomic species and their spatial distributions were determined in these plasmas. They can be measured by optical emission and absorption spectroscopy. Similar to the determination of the silicon ground-state density from the analysis of the self-absorbed...
Microwave generated plasmas present a simple and versatile tool for numerous plasma-technological applications. Detailed analysis of the plasma properties and of their temporal and spatial distributions is an important prerequisite for optimizing the process technology and the quality of the application as well. Examples among many others are the homogeneity, the permeability and the mechanical and...
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