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Complete miniaturized on-chip integrated solid-state capacitors have been fabricated based on conformal coating of vertically aligned carbon nanofibers (VACNFs), using a CMOS temperature compatible microfabrication processes. The 5 µm long VACNFs, operating as electrode, are grown on a silicon substrate and conformally coated by aluminum oxide dielectric using atomic layer deposition (ALD) technique...
Following the trend of electronic device miniaturization, on-chip integrated solid-state micro-supercapcaitors (MS) were fabricated based on vertically aligned carbon nanofibers (VACNFs) as electrode materials and polymeric gel electrolyte as the solid electrolyte. The VACNFs were grown at 390 °C and 550 °C temperature on interdigitated micro-patterns, where the dimensions of the digits were kept...
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