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This paper presents an analytical model for the floating element wall shear stress sensor with capacitive sensing. It clarifies the relationships between sensor performances and structural parameters. Therefore, the analytical model promotes the efficiency and effectiveness for obtaining the optimal design scheme of the sensor. A SOI based sensor was fabricated and characterized in this study. The...
High voltage radio frequency (RF) supply is a critical part in the ion trap system. To predict the resonant frequency of the RF supply for the ion trap, we model the helical resonator and the ion trap as a lumped element circuit. Based on the model we present the construction process of a helical resonator. We measured resonant frequency for different loads. The experimental results are in good agreement...
This paper reports radiation effects on mechanical characteristics of MEMS fixed-fixed beams and cantilevers after Co60 radiation. Radiation test is performed and resonant frequencies are measured by LDV. And stress relaxation has been recognized as main reason by theoretical analysis.
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