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As design complexity increases and process technologies shrink, high resolution and quick turnaround diagnostics are always in high demand. This is especially important for the development of high performance microprocessors, where not only the gross defects are a big concern, but small "AC" defects (soft defects) are as well. To diagnose these "AC" defects, conventional electrical...
Summary form only given. This paper describes a remote sensing concept that involves active thermal imaging with a millimeter-wave source (ATIMS). High frequency (HF) microwave or millimeter wave radiation can be beamed onto a target, thus generating rapid transient temperature increases in different portions of the target area. The time-dependent thermal contrast can be measured using sensitive infrared...
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