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The stress relief of tetrahedral amorphous carbon (ta-C) films by post-deposition thermal annealing was investigated. The films were subjected to rapid thermal annealing (RTA) for 2min and conventional furnace annealing (CFA) for 30min. In both cases, the films were annealed in vacuum with argon (4×10 −2 Torr) at successive higher temperatures ranging from 500 to 800°C. It was found that annealing...
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