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Four types of different hard transition metal nitrides (TMN:ZrN, CrN, WN and TiN) coatings were deposited on Si (100) and 316LN stainless steel substrates using DC magnetron sputtering. A comprehensive study of microstructure and substrate dependent tribo-mechanical properties of TMN coatings was carried out. Higher hardness (H) and elastic modulus (E) were obtained for WN (H=40GPa and E=440GPa) and...
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