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Here we present an elastomeric force sensitive resistor (FSR) made from a porous matrix of polydimethylsiloxane (PDMS) filled with carbon black. The fabrication process is based on the use of a low cost sacrificial sugar cube scaffold which leads to a highly porous and compressible material. By filling this porous matrix with carbon black we can achieve typical resistance changes from 20 kΩ to 100...
A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 μm. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 μm without damage. Typical contact resistances...
In this paper we report on the fabrication and testing of arrays of subwavelength apertures which are formed in a highly flexible polymer, PDMS (polydimethylsiloxane). PDMS can be elastically stretched to cause the deformation of any surface features. This enables transmission characteristics to be mechanically altered and has applications in terahertz biological and chemical sensing.
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