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We report design, fabrication and characterization of microelectromechanical systems (MEMS) enabled mechanically tunable 2D photonic crystal lens. The photonic crystal lens was realized by embedding honeycomb lattice silicon nano rods array inside flexible 10 μm thick SU-8 membrane. A pair of chevron shape nickel actuators was used to symmetrically stretch the 2D photonic crystal lens. The induced...
We report the microelectromechanical systems (MEMS)-enabled mechanically tunable negative-index photonic crystal lens, which was comprised of 2-D photonic crystal and symmetrical electro-thermal actuators. The 2-D photonic crystal was made of a honeycomb lattice of silicon rods embedded in an SU-8 membrane. A silicon input waveguide and deflection block were also fabricated for light in-coupling and...
We report design, fabrication and characterization of a MEMS-based tunable flexible photonic crystal, which is comprised of a periodic array of 290 nm diameter high-index (3.46) silicon rod embedded in a low-index (1.56) SU-8. A couple of chevron electro-thermal actuators are attached to the flexible photonic crystal and tunability is achieved by mechanical force generated by the actuators. The mechanical...
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