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A planar floating-gate NAND technology has previously realized a 0.87Gb/mm2 memory density using 3b/cell [1] and achieved a minimum feature size for 16nm [2]. However, the development of planar NAND flash is expected to reach the scaling limit in a few technology generations. To break though this limit, a significant shift to 3D NAND flash has begun and several types of 3D memory cell structures have...
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