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Multi-layer lithography machine is one of the most important equipment in integrated circuit production and it has attracted considerable interests on the dynamic reliability and precision reliability. This paper focuses on the dynamic precision reliability of six DOF micro-displacement mechanism in reticle stage, and establishes a dynamic error model based on homogeneous coordinate array theory....
Multi-layer lithography machine is one of the crucial equipments in the semiconductor integrated circuit industry. Recently, more and more research interests have been attracted to develop higher precision lithography machine. The error analysis plays an important role in the development of ultra-precision lithography machine. In this paper, the error analysis of six degrees of freedom micro-displacement...
Referring to the high-speed motorized spindle of a computer numerical control (CNC) machine tool, the safety and risk assessment problem of the spindle systems has been considered in order to extend the equipment life and improve the economic benefit. After summing-up the uncertain factors that mainly influence reliability allocation of the spindle system, a multi-hierarchic structure is established...
Fault tree analysis (FTA) is a popular methodology for system reliability analysis. The occurrence probability of the basic event is accurate in traditional fault tree (FT). Owe to the lack of the reliability data, especially in early design stage; a large amount of uncertainties may be included in FTA. In this study, the Dempster-Shafer (D-S) evidence theory is employed to quantify the uncertainty...
Reliability design of an aeroengine burner inner-liner is carried out using a bi-variant Lagrange factor polynomial approach. Thermal stress-dependent strength is represented by a discrete random variable that has different conditional probability mean functions under different thermal stress amplitudes. Then the LFP technique is developed to generate the stress-strength interference model with thermal...
In this research, a stress-strength interference model is developed based on bi-variant Lagrange factor polynomial approach. The first discrete random variable is the independent stress. Thermal stress-dependent strength is represented by the second discrete random variable that has different conditional probability mean functions depending on different stress amplitudes. Then the approach is used...
The increasing complexity of engineering systems has sparked rising interests in multidisciplinary design optimization (MDO). However, the main challenges in MDO are its computational expense and complexity structure. Therefore, to address these challenges, this paper focuses on a new MDO method, interaction prediction optimization approach, which is a design architecture applied in the multidisciplinary...
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