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In this study, the discharge characteristics of the developed atmospheric pressure homogeneous and cold plasma source in Ar/O 2 glow discharge driven by radio-frequency (13.56MHz) are investigated experimentally by means of electric measurements. The electron density is estimated to be in the order of 10 11 cm −3 in the abnormal discharge regime and is reduced by half in amount...
The breakdown behavior of an atmospheric-pressure radio-frequency capacitively coupled argon plasma discharge at 13.56 MHz is investigated in order to produce a stable and homogeneous atmospheric-pressure argon glow discharge. It is found that the electrode separation distance plays a pivotal role in exciting argon discharge whether in mobility-controlled electric breakdown or in diffusion-controlled...
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