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With the purpose of designing a completely decoupled XY micro-motion stage, a novel flexure hinge-based compliant parallel mechanism driven by piezoelectric actuators (PZT) is presented in this paper. The mechanism with a double symmetric structure is constructed by employing double fourbar flexures as prismatic joints due to their better stiffness performance. To obtain an accurate model, matrix...
Based on flexure hinges, a novel two-degree-of-freedom (2-DOF) compliant parallel micromanipulator driven by piezoelectric actuator (PZT) is presented in this paper. According to the designed mechanism structure, a pseudo rigid body (PRB) model is set up, and then the kinematics and statics are studied in a polar coordinate system. The workspace analysis is given subsequently according to the motion...
This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach,...
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