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A composite thin film with regular pillar array structure was fabricated by applying a coating of barium strontium titanate (Ba 0.7 Sr 0.3 TiO 3 , or BST) to freshly prepared silicon nanoporous pillar array (Si-NPA) substrate. Capacitive humidity sensors were made based on this BST/Si-NPA thin film and the corresponding sensing properties were investigated. Experimental results...
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