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Miniaturization and integration are the basic requirements of modern microfabrication. Electrochemical micromachining takes the advantages of no tool wear, no heat effect and high removal rate. In this paper, we investigate the electrochemical micromachining under mechanical motion mode. A tool alignment method was proposed based on the feedback of tunnel current. The effects of motion mode, rate...
A new strategy of confined etchant layer technique (CELT) for the micropatterning of Nafion film was described and tested. The local decomposition of polymer is realized by using an electrochemically combined chemical system to ignite and scavenge the radical reaction of polymer. For micropatterning, a copper mold is employed as the working electrode in a three-electrode cell that also contains a...
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