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Surface plasmon polaritons (SPPs) has attracted great attention in the last decade and recently it has been successfully applied to nanolithography due to its ability of beyond diffraction limit. This article reviews the recent development in plasmonic nanolithography, which is considered as one of the most remarkable technology for next-generation nanolithography. Nanolithography experiments were...
The focusing effect of the plasmonic nanolens is studied systematically. The influence of different construction parameters including the size of the central hole, the ring width of the surrounding concentric grating, the thickness of the metal film, and the distance of the central hole to grating has been simulated by rigorous finite difference time domain method and analyzed. It is found that the...
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