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The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the nano manipulation. This paper proposed an automated axis alignment method for a nano manipulator inside the SEM by recognizing the position of a closed-loop controlled the end-effector, which can characterize the relationship of these two axes and the rotation matrix...
Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I–V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sensing...
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