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This paper reports a robust sensing method using nonlinear micromechanical resonators for applications such as resonant mass and thermal radiation sensors. Resonators show stochastic response by applying noise, in which resonators show two vibration states, i.e. large vibration amplitude state and small vibration amplitude state. Single resonator acts as a bistable element, and from responses of the...
This paper reports the fabrication technique of electron micro-optics using silicon deep reactive ion etching. Stacked 120-mum-thick three silicon wafers stacked with cavities using patterned glass substrates are etched by ldquoa direct cavity through etching techniquerdquo. An array of the electron micro-optics consisted of three electrodes can be fabricated by one-mask process without alignment...
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