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Surface morphology, compositions, microstructure and optical properties of GaN film irradiated by highly charged Krq+ (q = 23, 15, 11) in two geometries to a fluence of 1 × 1015 krq+/cm2 were studied using AFM, XPS, PL, Raman scattering and UV–visible spectroscopy. The AFM observation shows that the irradiated GaN area is a swollen terrace. The swelling rate increased with the charge state (potential...
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