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The group IV elements doped ZnO thin-film transistors (TFTs) were deposited by radio-frequency magnetron sputtering on substrates at 150 . The influence of the dopant concentrations on the device performance was examined. Device characteristics such as threshold voltage were modulated and field effect mobility and saturated current could...
A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have...
Love-mode immunosensors based on ZnO/36degYX-LiTaO3 structures are studied. The ZnO films are grown on the 36degYX-LiTaO3 substrates by RF magnetron sputtering technique. The crystalline structures of the ZnO films are investigated by the X-ray diffraction (XRD) analysis, which show that the highly orientated (002) films are obtained. Then the Love-mode sensors are fabricated for monitoring antibody-antigen...
A kind of hydrogen sensors based on Rayleigh wave devices is presented. Generally, the Rayleigh wave devices are covered by a sensitive layer, such as WO3, to absorb hydrogen, which can be deposited by Sol-gel method or RF magnetron sputtering method. In the sensing experiment, frequency shift and/or insertion loss variation of the sensors exposed to H2 with different concentrations are measured at...
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