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In this work, for the first time different stiction mechanisms in electrostatic micro-electromechanical systems (MEMS) switches were studied. In these devices stiction can be caused by two main mechanisms: dielectric charging and meniscus formation resulting from the adsorbed water film between the switch bridge and the dielectric layer. The effect of each mechanism and their interaction were investigated...
In electrostatic capacitive MEMS switches, stiction can be caused by two main mechanisms: dielectric charging and meniscus formation resulting from the adsorbed water film between the switch suspended electrode and the dielectric film. In this study, for the first time the influence of each mechanism and the interaction between both mechanisms were investigated by measuring the adhesive force under...
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