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Amorphous carbon coatings about 20 nm thick are commonly used as an overcoat on magnetic thin-film rigid disks and tape and disk head surfaces to improve their wear performance. In this study, we deposited amorphous carbon coatings with thicknesses ranging from 20 to 400 nm on single-crystal silicon substrates by four deposition processes: cathodic are, ion beam deposition, r.f.-plasma-enhanced chemical...
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