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Relaxation of stress and point defects in ion-beam-sputtered Pt films with a thickness of 20 and 40 nm during isothermal annealing was investigated. First, isothermal differential dilatometry measurements based on X-ray analysis were carried out between 130 and 400 °C. They show that the relaxation of compressive stress is associated with the formation of vacancies at the surface. From the measurements,...
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