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An out-of-plane electrostatic microactuator delivering exceptionally high vertical displacements is described. The devices, based on an electrostatic zipper actuator design, employ composite Si/SiO2 beams with engineered stress gradients that result in large and controllable beam curvatures. The microactuators are fabricated in a silicon-on-insulator/deep reactive-ion etching process, with an additional...
This paper describes a novel large-displacement electrostatic “zipper” microactuator capable of achieving hundreds of microns of out-of-plane deflection, and application of fabricated microactuators to the control of millimeter-scale microfabricated capacitive pixels enabling “software-defined” microstrip antennas. The software-defined microstrip patch antenna concept relies on a reconfigurable array...
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