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This chapter discusses electrostatic/electret generator models, different configurations of electrodes, electret materials/charging methods, generator design, and prototyped micro‐electro‐mechanical‐system (MEMS) devices. Electrets have been commercialized for use in microphones and air dust filtering systems. The performance of an electret is often characterized with the surface charge density. However,...
A MEMS electret generator with nonlinear spring has been developed for energy harvesting applications. By using hybrid high-aspect-ratio parylene springs, a large-amplitude oscillation over 1.0 mmp-p has been obtained in a broad frequency range of 46-73 Hz. By using our mechanical model of the nonlinear spring, we have confirmed that the model can mimic frequency response of the mass-spring system...
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