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In this report, an improved in-plane electret energy harvester with gap-closing comb drives has been developed with a single-mask SOI process. By using 150 µm-thick device layer for increasing the seismic mass and 15 µm-thick buried oxide layer for reducing the parasitic capacitance, up to 5.3 µW output power has been obtained at 503 Hz, which is equivalent of five times higher power output than our...
X-shaped high-aspect-ratio parylene spring has been proposed for MEMS electret energy harvester in order to suppress the rotational motion of the seismic mass. A MEMS harvester prototype with the X-shaped spring is successfully microfabricated with parylene trench filling technology. The rotational angle has been reduced to 1/5 with the present spring structure, and 1.5 μW output power is obtained...
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