The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Voice-coil motor has a lot of advantages such as small volume and light weight, high speed, high acceleration and rapid response, hence it is used to drive wafer and reticle stages of lithography machine to accomplish precise motion. The influence of internal cooling on motor's motion accuracy is directly related to the performance and reliability of lithography machine. This paper aims to provide...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.