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Nanocrystalline Al-doped ZnO (AZO) thin films were deposited on glass substrates at room temperature by Mather-type plasma focus device using a ZnO target with an Al content of 3 wt%. The effect of number of focus shots on the microstructure, elemental composition, surface morphology and H2 gas sensor performance of AZO deposited thin films were investigated. X-ray diffraction (XRD) analysis confirmed...
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