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This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only...
This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm × 2mm. It has large scan range (>25°) at low driving voltage (∼4V) and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been...
We present a fiber-optic reflectance confocal microscope using a large-tunable-range MEMS microlens scanner for automatic axial scan. The tunable microlens is actuated by an electrothermal actuator that is capable of scanning up to 0.9 mm at less than 6.3 V. The lateral shift and tilt of the microlens are about 10 ??m and 0.4??, respectively. 2-D cross-sectional reflectance confocal images of micro-particles...
A miniature optical imaging probe based on a high-fill-factor MEMS mirror has been developed for nondestructive diagnosis of articular joint diseases and injuries. The MEMS mirror scans plusmn30deg at less than 6 V in both x- and y-axis. The outer diameter of the probe is 5.8 mm. Three-dimensional polarization-sensitive optical coherence tomography of canine meniscus has been successfully demonstrated.
We report an electrothermally-actuated microlens scanner suitable for biomedical imaging applications. Large vertical actuation range of ~0.9 mm with small lateral shift (< 7 mum) and tilting (< 0.38deg) is demonstrated for assembled glass lenses.
Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10deg, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved.
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