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Inductively coupled plasma dry etching of epitaxially grown aluminum nitride (AlN) film using Cl 2 /BCl 3 /Ar mixture has been investigated. The etch rate of AlN increases significantly with the addition of BCl 3 , and an etch rate as high as 258 nm/min has been demonstrated. High selectivity of AlN over Ni mask has been realized, and the etch rate of Ni is almost zero for...
The governing equations of two-dimensional bubble flow model for gas–liquid two-phase system in deep penetration molten pool of vacuum electron beam welding were developed according to the laws of mass and momentum conservation. The separation models of gas and liquid convections in bubble flow were formed by regarding the gas phase in molten pool as a particle phase, and the vacuolar fraction, velocity...
The influence of focusing thermal effect upon the weld shape, microstructure and alloying elements distribution in the welded joints during vacuum electron beam welding on AZ91D magnesium alloy was studied. The results show that the focus state affects the offset of DOF, and further significantly affects the actual welding heat input in the process of vacuum electron beam welding. The sharp focusing...
Seen from gas-liquid two-phase-flow system, the gas phase and liquid phase of bubble flow in weld pool are studied by means of isolated phase based on the conservation of mass and momentum. The two-dimensional fractional flow model of bubble flow in weld pool of vacuum electron beam welding is developed. And the gas distribution and the phenomenon of bubble flow in weld pool of AZ91D magnesium alloy...
Vacuum electron beam welding can have a low heat input, which means there is a minimum heat affected zone during welding of AZ91D magnesium alloy. From the observed microstructure, the weld of the AZ91D magnesium alloy can be divided into four regions, which are the weld metal zone, a partially-melted zone adjacent to the fusion boundary, a partially-melted zone adjacent to the base metal and the...
The deep-penetration thermal effect of keyhole and surface thermal effect of high-temperature metal vapor by the direct-acting mechanism during vacuum electron beam welding were analyzed. According to the thermal effect, a composite source model working for magnesium alloy welding was developed. This model was composed of Gaussian surface source and conical heat source. By the welding experiments...
According to the analysis to the characteristics of welding heat source and thermal effect, a mathematic model of rotary Gaussian body heat source with incremental power-density-distribution was developed, which was in line with the characteristics of heat source during vacuum electron beam welding. The affecting radius of source model decreases progressively with the law of Gaussian function and...
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