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We present a unique MEMS magnetometer based on a laterally-vibrating Thin-film Piezoelectric-on-Silicon (TPoS) resonator. This is the first time that the piezoelectric effect has been explored for the detection of magnetic fields among CMOS-compatible resonant devices. Strong electromechanical coupling provided by the Aluminium Nitride (AlN) layer, enhances sensitivity to allow operation in air as...
The shape and the size of the γ ′ phase s are the controlling factors for the mechanical and creep properties of nickel-based super-alloys. In order to take into account of the effect of these underlying microstructures on the deformation behavior of these alloys, a multi-scale approach is essential. In this work, a homogenized dislocation density based crystal p asticity model has been developed...
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