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A Si cleaning method has been developed by use of potassium cyanide (KCN) dissolved in methanol. When silicon dioxide (SiO 2 )/Si(100) specimens with 10 14 atom/cm 2 order copper (Cu) contaminants are immersed in 0.1M KCN solutions of methanol at 25°C, the Cu concentration is reduced to below the detection limit of total X-ray fluorescence spectrometer of ∼3×10 9 atoms/cm...
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