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The 2.7 inch flexible AMOELD is successfully demonstrated through FTIR analysis and mechanical simulation. Through FTIR analysis we can optimize the CVD parameter to realize the SiNx of WVTR~10−5 (60°/90% R.H.). According to the simulation result, the curvature radius can be reduced to 10mm by modulating the Organic Coating for Planarization(OCP) layer thickness.
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