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In this paper the electrical properties of PZT (52/48) thin films derived from seeded and unseeded sol-gel precursors are presented. A pure perovskite phase was obtained at lower temperatures, 550 o C for 30min, for film prepared from seeded precursors and deposited on platinum passivated silicon substrates (Pt/Ti/SiO 2 /Si). The electrical properties of these films also reflect the...
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