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In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external...
We focus on the potential of optical MEMS for large area applications and discuss why it is very beneficial to use micro system technologies, especially optical MEMS, on large scale. We present micromirror applications for daylight guiding into buildings and for light concentration in solar technologies as well as the corresponding technological approaches.
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