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A technique is presented for determining the thinnest oxide which satisfies a given time-dependent dielectric breakdown reliability specification. The intrinsic limit for a 10-yr lifetime at 125 degrees C is estimated to be 80 A for 5.5-V operation and 50 A for 3.6-V operation. For the particular technology studies here, 150-AA oxide meets typical reliability specifications for 5.5-V operation, and...
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